INDUSTRY SOLUTIONS

INDUSTRY SOLUTIONS

Chip Measurement Scheme
Customer Demand
Based on the provided samples, measure the chip offset and horizontal inclination
Product physical image
silicon chip measurement scheme
Measuring Result
DA imaging effec
wb10
wb11
wb12
DA test results
MasuriumAngleX biasedY biasedHht1Hht2Hht3Hht4Incline
Feature nameAngleX distanceY distanceAltitudeAltitudeAltitudeAltitudeResult1
Standard value0457.336.11901901901900
Upper tolerance0.0520205050505030
Lower tolerance-0.05-50-20-50-50-50-50-30
Specification upper limit0.05477.356.124024024024030
Specification lower limit-0.05407.316.1140140140140-30
Maximum value0.0418475.167630.2889222.9996209.4955215.4999223.503124.5056
Minimum value0.0234468.946318.1535195.5032199.4934198.9975196.495114.4959
Average value0.030066667471.45824.43916207.0007333203.3309667209.1649333209.164933318.8319
Range0.01846.221312.135427.496410.002116.502427.00810.0097
OK0.025468.946330.2889202.4994201.004215.4999207.496614.4959
OK0.0234470.260118.1535195.5032209.4955212.9974196.495117.4942
OK0.0418475.167624.8751222.9996199.4934198.9975223.503124.5056
LHA-IR imaging effect
wb10
wb11
wb12
LHA-IR test results
MasuriumAngleX biasedY biasedHht1Hht2Hht3Hht4Incline
Feature nameAngleX distanceY distanceAltitudeAltitudeAltitudeAltitudeResult1
Standard value0457.336.11901901901900
Upper tolerance0.0520205050505030
Lower tolerance-0.05-50-20-50-50-50-50-30
Specification upper limit0.05477.356.124024024024030
Specification lower limit-0.05407.316.1140140140140-30
Maximum value0.0418475.167630.2889222.9996209.4955215.4999223.503124.5056
Minimum value0.0234468.946318.1535195.5032199.4934198.9975196.495114.4959
Average value0.030066667471.45824.43916207.0007333203.3309667209.1649333209.164933318.8319
Range0.01846.221312.135427.496410.002116.502427.00810.0097
NG0.025468.946330.2889202.4994201.004215.4999207.496614.4959
NG0.0234470.260118.1535195.5032209.4955212.9974196.495117.4942
NG0.0418475.167624.8751222.9996199.4934198.9975223.503124.5056
Test Conclusion

Based on the provided samples, measure the chip offset and horizontal inclination

Machine: We recommend the AG series imaging system, combined with the i-Sobit software.