chip surface measurement

The Measurement Schemes For The Length, Width And Area Of The Chip Surface

Customer Demand

Requirement description: Measure the length and width of the rectangle on the chip, as well as the area.

Product physical image

Measuring Result

DA test results

Test results

Element name	RCT 1	RCT 1	RCT 1	RCT 2	RCT 2	RCT 2
Feature name	Length	Width	Area	Length	Width	Area
Standard values	0.1	0.1	0.01	0.1	0.1	0.01
1	0.094	0.0939	0.0088	0.0941	0.0941	0.0089
2	0.094	0.0939	0.0088	0.0941	0.0941	0.0088
3	0.094	0.094	0.0088	0.0941	0.0941	0.0089
4	0.094	0.094	0.0088	0.0941	0.094	0.0088
5	0.094	0.094	0.0088	0.0941	0.0941	0.0089

Element name	RCT 3	RCT 3	RCT 3	RCT 4	RCT 4	RCT 4	RCT 5	RCT 5	RCT 5
Feature name	Length	Width	Area	Length	Width	Area	Length	Width	Area
standard values	0.1	0.1	0.01	0.1	0.1	0.01	0.1	0.1	0.01
1	0.0945	0.0944	0.0089	0.0946	0.0945	0.0089	0.0949	0.0948	0.009
2	0.0945	0.0944	0.0089	0.0946	0.0945	0.0089	0.0949	0.0948	0.009
3	0.0944	0.0944	0.0089	0.0946	0.0945	0.0089	0.0949	0.0948	0.009
4	0.0945	0.0944	0.0089	0.0946	0.0945	0.0089	0.0949	0.0948	0.009
5	0.0945	0.0944	0.0089	0.0946	0.0945	0.0089	0.0949	0.0948	0.009

Test Conclusion

COBEKK recommends the AG series imaging system, which is equipped with the 06-5X automatic zoom coaxial optical lens, the OLYMPUS 5X/0.15 BD objective lens, and the i-Sobit software.

AG Series Semiconductor Packaging 3D tester

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INDUSTRY SOLUTIONS

AG Series Semiconductor Packaging 3D tester