INDUSTRY SOLUTIONS

INDUSTRY SOLUTIONS

Vapor Chamber Measurement Scheme
Customer Demand
According to the requirements, measure the surface flatness and other dimensions
Product physical image
Vapor Chamber  Measurement Scheme
Measuring Result
Test results
Ⅰ. Measurement location description:

1. Starting from the inner edge XY0.4 as the reference point, a total of 120 points are measured to fit the measurement plane, corresponding to size 1.

2. Use image measurement to determine the length and width of the step, corresponding to sizes 2 and 3 in the table.

3. Measure the heights of the four corners, corresponding to sizes 4, 5, 6, and 7.

4. Measure the radii of the four inner arcs, corresponding to sizes 8, 9, 10, and 11.

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Ⅱ. Measured date

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Ⅲ . Measurement Instructions:

1. The interval between laser points is 0.1mm. Approximately 700,000 points were taken on the sample plane. The measurement results are more accurate as they are closer to the actual product. Additionally, using the line laser is faster. It takes about 10 seconds to measure the flatness of this product, while the point laser takes approximately 100 seconds to measure 120 points.

2. Limitations: The width of the line laser is 30mm. It can only measure products within a width of 30mm. The length is not limited.

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Test Conclusion
Machine: Recommended AG Series of semiconductor-specific 3D inspection instruments, combined with point spectral measurement

Risk: It is not recommended to use probe measurement (the workpiece is small and very light. During contact measurement, it may cause the workpiece to shift, and there are requirements for fixtures)